| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a surface protecting film in which the surface of a resist adhesion-preventing layer is not eroded by cleaning with cleaning solvent and has a long time, high mold release property to a resist without lowering a property preventing adhesion of the resist by constituting the surface protecting film because the layer is not eroded by a polyhydric alcohol or its derivatives contained in a photoresist. SOLUTION: This surface protecting film is obtained by providing an undercoating layer and a layer preventing adhesion of the resist in this order on either one surface of a transparent polymer film and providing an tacky layer on the opposite surface. The undercoating layer contains hexamethoxymethyl-melamine. The layer preventing adhesion of the resist is obtained by curing an additive reaction type silicone composition to which a silane coupling agent is added, andγ-glycidoxypropyltrimethoxysilane having epoxy group in the molecule are contained in the silane coupling agent.</p> |
