发明名称 |
Semiconductor wafer pod |
摘要 |
A semiconductor wafer pod includes a measurement sensor configured within a housing. The sensor faces towards a surface of a wafer being accommodated in the pod. The pod can be connected to the conventional load-port of a semiconductor wafer manufacturing tool. Thereby, measurement data can be collected immediately after wafer processing without a need to transport the wafer. The invention enables the cost-effective development of tool-integrated metrology.
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申请公布号 |
US2003062578(A1) |
申请公布日期 |
2003.04.03 |
申请号 |
US20020262181 |
申请日期 |
2002.09.30 |
申请人 |
DOUGAN JAMES;TEGEDER VOLKER |
发明人 |
DOUGAN JAMES;TEGEDER VOLKER |
分类号 |
H01L21/00;H01L21/673;(IPC1-7):H01L27/14 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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