发明名称 |
Method for assembling a polishing head and apparatus for detecting air leakage in the polishing head while assembling the same |
摘要 |
Disclosed are a method for assembling a polishing while inspecting for air leakage in the polishing head and an apparatus for performing the same. By the present invention, a polishing head may be tested for air leakage at each assembly step thereof, so that the polishing head may be assembled free of air leakage, thereby reducing testing time of the polishing head, and failure of the polishing head due to air leakage may be prevented. The apparatus includes a housing supporting the polishing head and having coupling lines coupled with ends of tubes provided in the assembled polishing head, or the polishing head being assembled. A pneumatic pressure regulating section selectively supplies positive pressure or vacuum to the tubes through the coupling lines. A sensor section detects the pressure and level of vacuum in the tubes. A determining section determines if there is air leakage in the polishing head.
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申请公布号 |
US2003061865(A1) |
申请公布日期 |
2003.04.03 |
申请号 |
US20020259639 |
申请日期 |
2002.09.30 |
申请人 |
CHOI BONG;SUNG JUNG-HWAN;RO YONG-SEOK;KIM DOEG-JUNG |
发明人 |
CHOI BONG;SUNG JUNG-HWAN;RO YONG-SEOK;KIM DOEG-JUNG |
分类号 |
B24B49/00;B24B37/04;B24B55/00;G01M3/26;G01M3/28;(IPC1-7):B23P6/00;B29C73/00 |
主分类号 |
B24B49/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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