发明名称 |
INTERCHANGEABLE MICRODEPOSITION HEAD APPARATUS AND METHOD |
摘要 |
A microdeposition apparatus (10) and method according to the invention includes an interchangeable microdeposition head (16) for depositing fluid manufacturing material on a substruate to form microstructures. The apparatus (10) includes at least one of a plurality of microdeposition heads mounted on a head support and held above a substrate, which is mounted on a stage (12) in controlled alignment with the microdeposition head (16). The control system coordinates the relative movement of the stage and microdeposition head (16) while the fluid manufacturing material is discharged from the microdeposition head. A mounting bracket and computer system enable various microdeposition heads (16) to be interchangeably used with the microdeposition apparatus (10). |
申请公布号 |
WO02099850(A3) |
申请公布日期 |
2003.04.03 |
申请号 |
WO2002US17373 |
申请日期 |
2002.05.31 |
申请人 |
LITREX CORPORATION;EDWARDS, CHARLES, O.;ALBERTALLI, DAVID |
发明人 |
EDWARDS, CHARLES, O.;ALBERTALLI, DAVID |
分类号 |
B05D1/26;B05C5/00;B05C9/12;B05C9/14;B05C11/00;B05C11/10;B05D3/00;B25B11/00;B29C67/00;B41J2/01;B41J2/04;B41J2/045;B41J2/05;B41J2/055;B41J3/407;B41J3/54;H01L21/00;H01L21/683;H01L23/12;H01L51/50;H05B33/10;H05K1/02;H05K3/06;H05K3/12;H05K13/04 |
主分类号 |
B05D1/26 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|