HYDRAULICALLY DRIVEN DIAPHRAGM PUMP EQUIPPED WITH PRELOADED DIAPHRAGM

摘要

PROBLEM TO BE SOLVED: To provide a hydraulically driven diaphragm pump constituted to satisfactorily suck from vacuum with suction capacity not restricted by the formation of gas in a hydraulic pressure chamber, having a simple structure and high flow control accuracy simultaneously. SOLUTION: A significantly high pressing force is exerted on hydraulic liquid in a hydraulic pressure chamber 5 by the spring force of a diaphragm 1, which is powerfully preloaded so that excessively higher pressure is generated in the hydraulic pressure chamber 5 comparing to that in a force feed chamber 4.