THINNING METHOD FOR CRYSTAL COMPOSITE PLATE

摘要

PROBLEM TO BE SOLVED: To provide a thinning method precluding sensitivity from being lowered by deviation between joint interfaces, a pit from being formed on a main surface after the machining, and disconnection from occurring in forming an electrode pattern in a crystal composite plate 4 formed by sticking two crystal veneer sheets together. SOLUTION: The crystal composite plate 4 is directly joined together by planarly facing, at least, two or more prescribed-thickness crystal veneer sheets to each other and securing the flatness. This thinning method for the crystal composite plate 4 planarly machines each surface of its both surfaces by planar honing into the finishing surface roughness of 3 nm or less in its mean surface roughness.