| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum exhaust system and an operation method therefor capable of reducing a load of a mechanical booster pump to prolong its service life and preventing the generation of noise. SOLUTION: When the vacuum exhaust system 100 is operated, the mechanical booster pump (MBP) 9 and a rotary pump (RP) 10 are started while all valves 3, 4, 5, 6 and 8 are closed, a slow rough valve (SRV) 4 is opened after stopping the mechanical booster pump 9 once, and then the mechanical booster pump 9 is restarted.
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