| 摘要 |
PROBLEM TO BE SOLVED: To provide a beam space measuring device and a beam space measuring method, which quantitatively and accurately measure the distance between beams so that desired resolution of drawing can be adjusted without actually recording an image when the image is recorded by using the multi-beams composed of a plurality of beams being arranged parallel to each other in one direction. SOLUTION: The flux of light of the beams to be measured is partially restricted by a slit 24, and the slit 24 is moved, and the position of the slit 24, where the quantity of light of the beam obtained by the movement of the slit 24 becomes maximum, is detected, and at least two or more spaces of the beams are calculated. A linear wedge ND filter 36 is also employed instead of the slit 24.
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