发明名称 |
Methods and apparatus for void characterization |
摘要 |
The present invention provides a system for characterizing voids in test samples. An x-ray emission inducer scans a target such as a via on a test sample. A metallization or thin film layer emits x-rays as a result of the scan. The x-ray emission intensity can be measured and compared against a control measurement. The information obtained can be used to characterize a void in the scan target.
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申请公布号 |
US2003063705(A1) |
申请公布日期 |
2003.04.03 |
申请号 |
US20010990171 |
申请日期 |
2001.11.21 |
申请人 |
KLA-TENCOR TECHNOLOGIES CORPORATION |
发明人 |
NASSER-GHODSI MEHRAN;TESTONI ANNE;OESTREICH STEVEN |
分类号 |
G01N23/223;G01N23/20;G01N23/225;H01L21/66;(IPC1-7):G01B15/06 |
主分类号 |
G01N23/223 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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