发明名称 METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT
摘要 A method of manufacturing a micromechanical component has a substrate ( 1 ), a movable sensor structure ( 6 ) in a micromechanical functional layer ( 5 ) located over the substrate; a first sealing layer ( 8 ) on the first micromechanical functional layer ( 5 ) which is at least partly structured; a second micromechanical functional layer ( 10 ) on the first sealing layer ( 8 ), which has at least one sealing function and is anchored at least partly in the first micromechanical functional layer ( 5 ); and a second sealing layer ( 8 ) on the second micromechanical functional layer ( 10 ). The sensor structure ( 6 ) is provided with trenches ( 7 ) whose width is not larger than a maximum trench width ( 66 ), which is sealable by the first sealing layer ( 8 ) in the form of plugs ( 9 ) which do not extend to the trench bottoms.
申请公布号 EP1296886(A2) 申请公布日期 2003.04.02
申请号 EP20010921222 申请日期 2001.03.21
申请人 ROBERT BOSCH GMBH 发明人 LUTZ, MARKUS
分类号 B81C1/00;B81B3/00;B81B7/00;G01P1/02;G01P15/08;G01P15/125;(IPC1-7):B81B1/00 主分类号 B81C1/00
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