| 摘要 |
The present invention relates to a thin film piezoelectric element used in an actuator unit for fine positioning in particular, and its manufacturing method. In the manufacturing method, two piezoelectric thin films (53,57) held between electrode layers (52,54,56,58) are laminated by using adhesive (60), and only the second substrate is selectively removed in order to process the thin films remaining on the first substrate into a plurality of separated structures (70). After that, an insulating layer (62) and external connecting electrode (75) are formed so as to cover the exposed surface of the structure, thereby forming a plurality of thin film piezoelectric elements. Also, resin is applied to cover the thin film piezoelectric element, and a temporary fixing substrate is bonded thereto, and after selectively removing the first substrate, the temporary fixing substrate is separated, and the resin is removed from the piezoelectric element surface in order to separate the plurality of thin film piezoelectric elements. According to this manufacturing method, it is possible to provide thin film piezoelectric elements which are inexpensive and excellent in mass-production feasibility. |
