APPARATUS FOR APPLYING COATING LIQUID TO SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide an applying apparatus for forming a coated film having uniform thickness on the whole surface of a substrate. SOLUTION: A slit-shaped discharge port 2 of a liquid discharging nozzle 12 is formed with a fixed plate 18 opposed to a shifting plate 20 while a narrow gap 22 is interposed between them and the plate 20 shiftable to the direction that the plate 20 goes close to or apart from the plate 18. A plurality of piezoelectric actuators 16 for shifting the plate 20 are arrayed along the longitudinal direction of the port 2 and controlled individually so that the coating liquid to be discharged from the port 2 forms a uniform liquid film.