发明名称 |
Flame stablizer for burner for flame hydrolysis deposition |
摘要 |
A flame stabilizing apparatus is disclosed for application to a burner for a flame hydrolysis deposition (FHD) process. In the flame stabilizing apparatus, a co-flow diffusion flame burner (100) emits a flame onto a substrate and a flame stabilizer (30), installed around the burner coaxially, isolates the emitted flame from an instable ambient flow to stabilize the flame and a particle flow. <IMAGE> |
申请公布号 |
EP1278009(A3) |
申请公布日期 |
2003.04.02 |
申请号 |
EP20020004951 |
申请日期 |
2002.03.05 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
CHO, JAE-GEOL |
分类号 |
F23D14/38;C03B8/04;F23C99/00;F23D14/22;F23D14/26;F23D14/32;F23D14/56;F23D14/70;F23D14/84;F23D99/00 |
主分类号 |
F23D14/38 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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