发明名称 Flame stablizer for burner for flame hydrolysis deposition
摘要 A flame stabilizing apparatus is disclosed for application to a burner for a flame hydrolysis deposition (FHD) process. In the flame stabilizing apparatus, a co-flow diffusion flame burner (100) emits a flame onto a substrate and a flame stabilizer (30), installed around the burner coaxially, isolates the emitted flame from an instable ambient flow to stabilize the flame and a particle flow. <IMAGE>
申请公布号 EP1278009(A3) 申请公布日期 2003.04.02
申请号 EP20020004951 申请日期 2002.03.05
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 CHO, JAE-GEOL
分类号 F23D14/38;C03B8/04;F23C99/00;F23D14/22;F23D14/26;F23D14/32;F23D14/56;F23D14/70;F23D14/84;F23D99/00 主分类号 F23D14/38
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