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发明名称
BOTTOM ANTI-REFLECTIVE COATING USING RAPID THERMAL ANNEAL WITH OXIDIZING GAS
摘要
申请公布号
EP1297563(A1)
申请公布日期
2003.04.02
申请号
EP20010933280
申请日期
2001.05.09
申请人
ADVANCED MICRO DEVICES INC.
发明人
STEPHEN, ALAN, D.;EXTERKAMP, MICHAEL, E.;DOAN, JONATHAN
分类号
H01L29/423;G03F7/09;H01L21/027;H01L21/28;H01L21/3065;H01L21/318;H01L29/49;H01L29/78;(IPC1-7):H01L21/027
主分类号
H01L29/423
代理机构
代理人
主权项
地址
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