WET PROCESSING NOZZLE AND WET PROCESSOR

摘要

PROBLEM TO BE SOLVED: To prevent the generation of contamination in processing solution during a wet processing and to prevent the occurrence of loss in ultrasonic wave vibration being added to an ultrasonic wave propagation section from an ultrasonic wave vibrator. SOLUTION: The wet processor is provided with an oscillator which generates ultrasonic frequency electric signals, an ultrasonic wave vibrator to which the signals are applied and an ultrasonic wave propagating section 123 in which one end of the section 123 is linked to the output terminals of the vibrator, the other end is provided with a liquid contacting surface 130 to oppose an object W to be wet processed and a tube housing hole 132 that houses a liquid supplying and discharging tube 131 to supply and discharge wet solution 2 to the surface 130.