Optical probe array head device

摘要

Provided is an optical probe array head device in which a single optical detector or a plurality of optical detectors are disposed to each of the optical probes constituting an optical probe array having a plurality of apertures. The optical detectors are arranged to surround the aperture so as to be able to efficiently detect scattering of a feeble near-field light enabling similtaneous detection of a multipilicity of optical signals. In this device, an optical lens system necessary for optical detection can be omitted by integrating the optical probe array and the optical detectors. In addition, the output signals from the optical detectors can be utilized for conducting position control of the optical probe array head.