Synthetic quartz glass member for excimer laser and method of making

摘要

A synthetic quartz glass member having (i) a change of transmittance at 193 nm of up to 0.002 cm-1 as expressed in extinction coefficient when 4x104 shots of ArF excimer laser light are irradiated at 2 mJ/cm2/pulse, (ii) an initial transmittance of at least 99.6% at 193 nm, (iii) a hydrogen molecule content of at least 5x1017 molecules/cm3, (iv) a refractive index amplitude of up to 1x10-6, and (v) a birefringence of up to 1 nm/cm finds use in an excimer laser because it experiences a minimized change of light transmittance.