| 发明名称 |
Automation of transmission line pulse testing of electrostatic discharge devices |
| 摘要 |
A method and apparatus for automated testing of a plurality of electrostatic discharge (ESD) devices on a wafer. The wafer has M padsets and N conductive pads on each padset, where m is at least 1, and n is at least 2, and each ESD device is conductively coupled to a unique plurality of pads of a padset of the M padsets. Testing sequences, under program control of a computer system, implement the testing of the ESD devices.
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| 申请公布号 |
US6541981(B2) |
申请公布日期 |
2003.04.01 |
| 申请号 |
US20010832072 |
申请日期 |
2001.04.10 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
ALLARD, JR. HARVEY C.;COOK DONALD J.;GAUTHIER, JR. ROBERT J.;HOYT EDWARD S.;REINHART DAIN E.;WATSON JOHN A. |
| 分类号 |
G01R31/00;G01R31/14;G01R31/28;(IPC1-7):G01R29/12;G01R31/02;G06F19/00;H02H9/02 |
主分类号 |
G01R31/00 |
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