发明名称 High-speed high electron mobility transistor photodetector using low temperature gallium arsenide
摘要 A high electron mobility transistor photodetector includes an undoped GaAs buffer, a p-type GaAs layer positioned above the undoped GaAs buffer that is between 0.5 to 1 mum in thickness, an undoped low temperature GaAs layer positioned above the p-type GaAs layer, an undoped GaAs layer positioned above the low temperature GaAs layer, a layer of undoped InGaAs positioned above the undoped GaAs layer, a layer of undoped AlGaAs positioned above the layer of InGaAs, an n+ AlGaAs charge-suppling layer positioned above the layer of undoped AlGaAs, an n+ GaAs contact layer positioned above the n+ AlGaAs charge-supplying layer, and source and drain ohmic contacts positioned above the n+ GaAs contact layer. A negative bias voltage is applied to the p-type GaAs layer to sweep the holes from the photo-absorptive layer which greatly increases the speed and responsiveness of the device.
申请公布号 US6541803(B1) 申请公布日期 2003.04.01
申请号 US20000556152 申请日期 2000.04.21
申请人 THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF THE ARMY 发明人 FOLKES PATRICK A.
分类号 H01L31/101;(IPC1-7):H01L31/112 主分类号 H01L31/101
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