Thin film metal hydride hydrogen sensor

摘要

A sensor for determining the presence of hydrogen and for measuring the amount of hydrogen present in the vicinity of the sensor. The sensor comprises a metal hydride hydrogen-absorbent material AB5 which selectively absorbs hydrogen and expands upon such absorption. This expansion depends on the amount of hydrogen absorbed and the expansion is detected and measured either by measurement of a change in capacitance of the sensor or by the change in tunnel current flowing through the sensor. A method for determining the presence of hydrogen and for measuring the amount of hydrogen present using the metal hydride hydrogen-absorbent material AB5-based sensor.