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发明名称
摘要
申请公布号
JP3392245(B2)
申请公布日期
2003.03.31
申请号
JP19940336893
申请日期
1994.12.27
申请人
发明人
分类号
C30B17/00;C30B27/00;H01L21/208;(IPC1-7):C30B17/00
主分类号
C30B17/00
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代理人
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