发明名称 SYSTEM FOR REUSING WATER SOLUBLE SLURRY WASTE FLUID
摘要 A SYSTEM FOR REUSING WATER SOLUBLE SLURRY WASTE FLUID (2) WHEREIN SEPARATED AVAILABLE ABRASIVE GRAINS (P) AND EXTRACTED WATER SOLUBLE COOLANT (Q) ARE REUSED. THIS SYSTEM IS CAPABLE OF REDUCING A DISPOSAL COST DUE TO A REDUCTION OF A LOAD TO A WASTE WATER DISPOSAL PLANT BY EFFECTIVELY REUSING WATER SOLUBLE SLURRY WASTE FLUID (2), AND MAKING A CONTRIBUTION TO A REDUCTION OF A TOTAL SLICING COST BY REUSING ABRASIVE GRAINS (P) AND WATER SOLUBLE COOLANT (Q). (FIG 1)
申请公布号 MY115067(A) 申请公布日期 2003.03.31
申请号 MYPI9700633 申请日期 1997.02.20
申请人 SHIN-ETSU HANDOTAI CO., LTD.;MIMASU SEMICONDUCTOR INDUSTRY CO., LTD;HITACHI ZOSEN METAL WORKS CO., LTD;OHTOMO CHEMICAL IND., CORP. 发明人 KOHEI TOYAMA;ETUSO KIUCHI;KAZUO HAYAKAWA;SHINGO KABURAGI;AKIO ASHIDA;TAKARA ITO;KUNIAKI NOAMI
分类号 B01D21/01;B24B57/00;B28D1/02;B28D7/02 主分类号 B01D21/01
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