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发明名称
摘要
申请公布号
JP3392031(B2)
申请公布日期
2003.03.31
申请号
JP19970347735
申请日期
1997.12.17
申请人
发明人
分类号
H01L21/76;H01L21/265;H01L21/8234;H01L27/088;(IPC1-7):H01L21/823
主分类号
H01L21/76
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