| 摘要 |
PURPOSE: A method is provided to be capable of depositing a deposition material on a substrate without an error. CONSTITUTION: An auxiliary mask(102) for supporting at least one part of a frame(30) is mounted at one end side of a shadow mask. The auxiliary mask has an open portion(50) formed at one side of the shadow mask(100) to open an active region(34) of the shadow mask. The shadow mask consists of the active region and the frame formed at an edge of the active region. A substrate is aligned to the other side of the shadow mask. A deposition material is deposited on a substrate through the active region of the shadow mask. The shadow mask is closely attached with the substrate by applying a magnetic field to an opposite surface of the substrate where the shadow mask is closely attached.
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