发明名称 SEMICONDUCTOR MEMORY DEVICE
摘要 PROBLEM TO BE SOLVED: To materialize a dynamic semiconductor memory device which is suitable for mixed loading with a logic, by forming itself in a CMOS process. SOLUTION: A conductive wire (3) forming the word line (WL) of a memory cell (MC), and a conductive wire (5) forming a memory cell cell plate electrode (CP), are made on the same wiring layer. The difference of the level in a capacitor is removed by constituting a memory cell capacitor into planar capacitor structure.
申请公布号 JP2003092364(A) 申请公布日期 2003.03.28
申请号 JP20010294441 申请日期 2001.09.26
申请人 MITSUBISHI ELECTRIC CORP 发明人 ARIMOTO KAZUTAMI;SHIMANO HIROKI
分类号 G11C11/401;G11C11/404;G11C11/405;G11C11/407;G11C11/409;G11C11/4097;H01L21/8242;H01L27/10;H01L27/108 主分类号 G11C11/401
代理机构 代理人
主权项
地址
您可能感兴趣的专利