发明名称 INSULATED GATE SEMICONDUCTOR DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To reduce an on-voltage. SOLUTION: Stripe type trenches 207 in which a gate electrode 210 is buried are formed on an upper main surface of a semiconductor base body 200, and an N<+> emitter layer 206 is exposed in a ladder type on the upper main surface of the base body 200 sandwiched by the adjacent trenches 207. As a result, an emitter electrode 212 is surely in contact with the N<+> emitter layer 206 when a position of a belt type region Ra as a contact surface with the emitter electrode 212 is deviated. The ladder type N<+> emitter layer 206 is formed adjacently to the trenches 207, so that a channel region 208 is formed continuously along the trenches 207. Micronization of an element is facilitated and contributes effectively to the reduction of an on-voltage.</p>
申请公布号 JP2003092406(A) 申请公布日期 2003.03.28
申请号 JP20020210773 申请日期 2002.07.19
申请人 MITSUBISHI ELECTRIC CORP 发明人 TAKAHASHI HIDEKI;NISHIHARA SHUSUKE;HARADA MANA;MINATO TADAKURO
分类号 H01L29/78;H01L29/739;(IPC1-7):H01L29/78 主分类号 H01L29/78
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