| 摘要 |
PROBLEM TO BE SOLVED: To provide a dry vacuum pump preventing the damage of a pump and a motor due to a reaction by-product solidifying in the pump, increasing a life of the pump, and improving production efficiency. SOLUTION: In a dry vacuum pump wherein a rotor is disposed in a casing and gas is discharged by rotation of the rotor, an airtight space 40 is formed on the outside of casings 32, 33. A pipe 22 connecting the airtight space 40 and the pump 30, and an opening/closing valve 24 installed in the pipe 22 are provided, thereby maintaining the airtight space 40 in vacuum.
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