| 摘要 |
PROBLEM TO BE SOLVED: To improve the reliability of the defect classification. SOLUTION: A PC 16 for image display to display a defect selective window Wa comprising the image of a result image file which is an inspection result by an automatic macro inspection and the information of the inspection result of a defective part of a labeling '3' stored in an inspection result file 13, for example, defect classification and defect name is provided adjacent to a manual macro inspection device 8, and the actual manual macro inspection result is comparatively observed while referring to the automatic macro inspection result. If the automatic macro inspection results such as the classification of the defective parts and the defect names are different from the manual macro inspection result, the classification of the defective parts and the defect names are corrected in the defect selection window Wa and are temporarily registered. |
