发明名称 METAL GASKET FOR VACUUM DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To solve a problem that corrosion resistant material such as nickel doesn't have sufficient spreadability and can't secure air tightness. SOLUTION: A gasket 13 is formed with nickel, nickel alloy or stainless steel, and a groove 10 is formed by cutting a part to form a seal surface 1s getting into contact with a knife-edge 2b of a joint. The groove 10 is formed a step lower than land parts 11a, 11b composed of both side surfaces 1a. The land part prevents a gasket from getting into contact with another gasket or a loading stand or the like over the whole process from manufacturing to installation of the gasket and thus damages and scratches are prevented from being formed on the gasket.
申请公布号 JP2003090437(A) 申请公布日期 2003.03.28
申请号 JP20020145484 申请日期 2002.05.20
申请人 BAKKUSU SEV:KK 发明人 SHINODA HAYAO;KUROKOCHI SATOSHI
分类号 C23C14/56;C23C16/44;F16J15/08;F16L23/20;H01L21/205;(IPC1-7):F16J15/08 主分类号 C23C14/56
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