| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for cleaning a glass substrate effectively removing fine particles relatively firmly stuck to the substrate in a manufacturing process of a liquid crystal display panel. SOLUTION: In addition to an air cleaning method, the glass substrate to be cleaned is placed on a vibration body to generate specified vibration and is vibrated. That is to say, by vibrating the glass substrate 1 with the vibration body 4, the fine particles stuck thereto are detached so as to be easily air cleaned. Subsequently an ultrasonic air wave is sprayed thereto and the fine particles are removed. |
