SUBSTRATE FOR THIN FILM MAGNETIC HEAD AND POLISHING METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a substrate for a thin film magnetic head free from a scratch having extremely narrow width on the surface of an amorphous alumina film and high in reliability. SOLUTION: The scratch having >=0.2μm width on the surface of the amorphous alumina film 2 can be eliminated by polishing the surface of the amorphous alumina film 2 film-deposited on an Al2 O3 -TiC based ceramic substrate 1 by a CMP method while alkaline slurry is being supplied.