APPARATUS FOR PREVENTING GAS LEAK OF SOURCE HEAD GAS LINE IN ION IMPLANTER

摘要

PURPOSE: An apparatus for preventing a gas leak of a source head gas line in an ion implanter is provided to prevent the leakage of a connection portion in a process for assembling a gas line of a source head by forming a part of the source head gas line as a bellows tube. CONSTITUTION: The first connection portion(14) is combined with a lower portion of a side plate of an arc chamber(10). A gas line(12) is connected with the first connection portion(14) connected with the arc chamber(10). The second connection portion(20) is formed at a lower portion of the gas line(12). A bellows tube(22) is formed on the gas line(12). A plunger bolt is formed at the lower portion of the side plate of the arc chamber(10). A plunger nut is installed at an upper portion of the gas line(12). The plunger bolt is combined with the plunger nut.