| 发明名称 |
INTERNALLY MARKED QUARTZ GLASS, QUARTZ GLASS SUBSTRATE FOR OPTICAL MEMBER AND MARKING METHOD |
| 摘要 |
<p>PROBLEM TO BE SOLVED: To produce internally marked quartz glass characterized in that the amount of retardation produced by marking is <=20 nm just near a marking end. SOLUTION: The internally marked quartz glass without the impairment of optical accuracy can be provided and is applicable as a quartz glass substrate for optical members for electronic industry.</p> |
| 申请公布号 |
JP2003089553(A) |
申请公布日期 |
2003.03.28 |
| 申请号 |
JP20010277741 |
申请日期 |
2001.09.13 |
| 申请人 |
SHIN ETSU CHEM CO LTD;NAOETSU SEIMITSU KAKO KK |
发明人 |
YAMADA MOTOYUKI;YAMAGA KOJI |
| 分类号 |
G02B1/00;B23K26/00;B41M5/26;C03B20/00;C03C23/00;H01S3/00;(IPC1-7):C03C23/00 |
主分类号 |
G02B1/00 |
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