| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray inspection device. SOLUTION: This X-ray inspection device includes a degradation determining means 7a to determine degradation of a target 11 and a storage means 26 in which the deflection of the electron beam 45 is stored in advance, and has a controller 7 to deflect the electron beam 45 to make it incident on an uncollided position of the target 11 based on the stored deflection by controlling an electron beam deflecting means 8 when the degradation of the target 11 is determined. When the degradation of the target 11 is determined by the controller 7, the electron beam deflecting means 8 is controlled by the controller 7, the position of collision of the electron beam 45 to the target 11 is moved from the position of degradation to the uncollided position based on the deflection stored in advance, and the quantity of X-ray reduced by the degradation of the target 11 can be increased. |
