| 摘要 |
PROBLEM TO BE SOLVED: To provide a disc spring material made of a silicon nitride plate large in a spring constant, especially a favorable disc spring material as a tool to pressurize a metal plate and a ceramic plate and its manufacturing method. SOLUTION: This disc spring material is made of the silicon nitride plate the spring constant of which is more than 2 N/mm. It is made of the silicon nitride plate plate thickness of which is 4-1 mm, warp quantity in the longitudinal direction at temperature 500-1000 degrees C of which is 3-5 mm as it is converted per 50 mm length, three- point flexural strength of which is more than 600 MPa and the spring constant of which is more than 2 N/mm. A tool for pressurization is constituted of a metal plate made of the disc spring material and the ceramic plate. The manufacturing method is of the disc spring material made of the silicon nitride plate of the spring constant of more than 2 N/mm constituting a characteristic feature of sintering a silicon nitride green sheet after degreasing it in a state of further adding a load by clamping it with the tool having the part curved by 3-5 mm per 50 mm length in the warp quantity in the longitudinal direction. It is favorable that the tool is made of boron nitride under this manufacturing method. |
