| 摘要 |
PROBLEM TO BE SOLVED: To manage a processing time regarding a plurality of films to be formed and to facilitate an edition of a schedule. SOLUTION: A method for scheduling to process a multi-chamber film forming apparatus comprises the steps of calculating the processing time including a film forming time and a conveying time according to a processing order intrinsic for a substrate before starting to process a substrate 13, dividing the calculated processing time at each time, forming a processing schedule based on the processing order intrinsic for the processing time divided at each unit time, and editing to avoid a duplicate when the processing is duplicated within the same unit time between the substrates.
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