| 摘要 |
PROBLEM TO BE SOLVED: To provide an SPM cantilever, which has a probe of a high aspect ratio, in which the tip of the probe perpendicularly faces the surface of a measuring sample and with which the surface shape of any sample shape can be measured precisely and with high resolution, and to provide a method of manufacturing the cantilever. SOLUTION: The SPM cantilever is provided with a support part 1, a lever part 2 extended from the support part and a tetrahedral probe 3, which is arranged on the free end side 4 of the lever part by tilting a probe axis 5 and which is formed of three faces. The SPM cantilever with a CNT part is constituted, in such a way that a catalyst metal film 6, such as an Ni film or the like, is formed over the whole face on the probe formation side of the cantilever, and that the CNT part 8 is formed at the probe tip 7, so as to be tilted to the direction on the free end side of the lever part 2 from the vertical face with reference to the lever part 2.
|
