SUBSTRATE CONTAINER, SUBSTRATE TRANSPORT SYSTEM, STORAGE DEVICE AND GAS SUBSTITUTING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a substrate storage container in which atmosphere in the whole storage container can efficiently be substituted in a short time by suppressing the mixed foreign matters, and to provide a substrate transport system and a gas substituting method. SOLUTION: When gas is made to flow into the substrate storage container from a gas flow-in port disposed in the substrate storage container 200 storing a substrate 40 and the atmosphere in the substrate storage container is replaced, the atmosphere in the substrate storage container is sucked and the inside is made negative in pressure against the outside air.