APPARATUS FOR PROTECTING WAFER LIFT ASSEMBLY OF ION IMPLANTER

摘要

PURPOSE: An apparatus for protecting a wafer lift assembly of an ion implanter is provided to operate smoothly a wafer lift by preventing or intercepting the inflow of contaminants into the wafer lift. CONSTITUTION: A wafer lift(10) is installed in the inside of a bracket device(50). A plurality of spindle driving portions(21,22) are installed at a lower end portion of the wafer lift(10) in order to drive a plurality of disks. A protective cover(15) is used for covering a lower end portion of a wafer lift(10) toward a direction of a shaft in order to prevent disturbance of a lubricating operation due to contaminant generated from the inside of a bracket device(50) to a lower end portion of a wafer lift(10). A scan shaft(40) is inserted into the bracket device(50). An exhaust line(60) is installed nearly to the spindle driving portions(21,22).