REMOVABLE SHIELD ARRANGEMENT FOR ICP-RIE REACTOR

摘要

PROBLEM TO BE SOLVED: To provide an effective shield in an ICP-RIE reactor. SOLUTION: A separate shield arrangement 20 is included which is fixed in a detachable way on a substrate holder 3 above a clamping means 10 to mask the clamping means with respect to reactive ion flux. The shield arrangement 20 made of a single ring can be mounted on the substrate holder 3 directly upon the clamping means or can also be mounted directly above it and separated by a smaller distance from the clamping means 10. The shield arrangement 70 can also be made of at least two rings 22. The material of the shield arrangement 20 can be covered with a film of dielectric material and electrically connected to the ground 23 through the substrate holder 3.