| 摘要 |
PURPOSE: A thermocouple of semiconductor fabrication equipment is provided to prevent a variation of counter electromotive force by removing the short circuit of metal lines. CONSTITUTION: A couple of metal lines(26a,26b) of different kinds are fixed to terminals(28a,28b) in order to prevent the separation and short circuit of the metal lines(26a,26b). A terminal box(20) is contacted with a meter portion. An insulating tube(22) is formed with a sus bellows material. The insulating tube(22) is contacted with the metal lines(26a,26b) in order to insulate the metal lines(26a,26b) and protect temperature. A fixing portion(24) is used for fixing a thermocouple. End portions of the metal lines(26a,26b) fixed to the terminal box(20) are connected with the terminals(28a,28b).
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