Apparatus and method for testing of microscale to nanoscale thin films

摘要

Apparatus and method for testing a thin film material. A chip is fabricated that includes the specimen to be tested, held by a force sensor beam at a first longitudinal end and by a support structure at a second longitudinal end. The chip is configured to be placed into a testing environment for quantitative and qualitative material property testing of the specimen. Methods are also provided for fabricating a testing chip.