发明名称 Method of recording identifier and set of photomasks
摘要 A method of recording identifiers, each including a group of character strings A and B including z1, and Z2 characters, respectively, on plate members involves the use of a photomask of a first type and at least one photomask of a second type. The photomask of the first type has an opaque pattern defining the character string A. The photomask of the second type has an opaque pattern defining at least one of the characters of the character string B. The method further includes the steps of forming a photoresist layer on one of the plate members, selectively exposing the photoresist layer to a radiation through the photomask of the first type to form a latent image of the character string A in the photoresist layer, and forming a latent image of the character of the character string B in the photoresist layer through the photomask of the second type.
申请公布号 US2003059726(A1) 申请公布日期 2003.03.27
申请号 US20020229038 申请日期 2002.08.28
申请人 SUMITOMO SPECIAL METALS CO., LTD. 发明人 HIROOKA TAISUKE
分类号 G03F1/00;G03F1/14;G03F1/68;G03F7/20;G03F9/00;G11B5/31;G11B5/60;H01L21/027;H01L23/544;(IPC1-7):G03F9/00 主分类号 G03F1/00
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