| 发明名称 |
Mount for an optical element in an optical imaging device |
| 摘要 |
A mount for an optical element in an optical imaging device, in particular in a lens system (4) for semiconductor lithography, has at least one mounting ring (2) which bears the optical element (6). The mounting ring (2) is of at least partially hollow design in cross section.
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| 申请公布号 |
US2003058551(A1) |
申请公布日期 |
2003.03.27 |
| 申请号 |
US20020247964 |
申请日期 |
2002.09.20 |
| 申请人 |
CARL-ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG |
发明人 |
WEBER ULRICH;BECKER JOCHEN;HOLDERER HUBERT;GELLRICH BERNHARD;KUGLER JENS |
| 分类号 |
G02B7/02;(IPC1-7):G02B7/02 |
主分类号 |
G02B7/02 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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