Ceramic-embedded micro-electromagnetic device and method of fabrication thereof

摘要

A micro-electromagnetic device is formed by providing internal channels in a ceramic housing sintered from ceramic materials with high dielectric strength and infiltrating these channels with molten metal. The invention allows the fabrication of arrays of ceramic embedded micro-electromagnetic devices as well as ceramic embedded helical micro-antennas designed for use in the high GHz and THz regions at a fraction of the present cost of manufacturing of such devices and with virtually no restriction to their miniaturization.