| 摘要 |
<p>A notched compound semiconductor crystal kept identical in specifications even when turned over. A compound semiconductor wafer produced by slicing a compound semiconductor crystal having a crystal plane of (100) plane, wherein, when a notch is formed in a [010] direction, the crystal is sliced by being tilted from the (100) plane in a [101] or [10-1] direction; when a notch is formed in a [001] direction, it is sliced by being tilted from the (100) plane in a [0-10] or [010] direction; when a notch is formed in a [0-10] direction, it is sliced by being tilted from the (100) plane in a [001] or [00-1] direction; and, when a notch is formed in a [00-1] direction, it is sliced by being tilted from the (100) plane in a [010] or [0-10] direction.</p> |
