Sensor element for measuring a physical variable between two bodies which move relative to each other and are subjected to high tribological strain, whereby the element has very high wear resistance to increase its service life

摘要

Sensor element (5) comprises a sensor web element (13, 30) that is partially disposed between the two bodies, and separated from the body (10) on which it is mounted by an insulating layer (12). The insulating layer comprises at least two layers, one of which layers can be exposed to higher tribological strain, while the other is a poor conductor. The layers are substantially carbon, or carbon with oxygen and silicon. The insulation layer is made up of alternating layers of carbon and carbon with silicon and oxygen. This enables highly wear resistant carbon layers to be interleaved with poor conducting, i.e. insulating layers.