发明名称 |
DIELECTRIC FILM |
摘要 |
A dielectric film is provided which includes a base layer and a capping layer, preferably silicon oxynitride, wherein the film is an effective moisture and ion barrier when disposed between a conductive substrate and a liquid having an electrical potential different than the electrical potential of the substrate.
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申请公布号 |
WO03025992(A1) |
申请公布日期 |
2003.03.27 |
申请号 |
WO2002US29505 |
申请日期 |
2002.09.17 |
申请人 |
ADVION BIOSCIENCES, INC. |
发明人 |
LI, JIE;CORSO, THOMAS, N.;SCHULTZ, GARY, A. |
分类号 |
G01N27/447;B32B7/00;B81B1/00;G01N30/72;G01N37/00;G02B1/11;H01B3/10;H01B3/12;H01B7/282;H01B17/60;H01J49/04;H01L21/306;H01L29/00;H01L29/74;H01L29/76;H01L29/78;(IPC1-7):H01L21/306 |
主分类号 |
G01N27/447 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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