AUTOMATIC GUIDED VEHICLE

摘要

In an automatic guided vehicle that comprises a transfer device for transferring wafers, a buffer cassette temporarily receiving wafers, and a pressing member disposed at the opening in the buffer cassette, and that is so arranged that when the automatic guided vehicle is to be driven, the pressing member is slid from the lateral end position of the buffer cassette opening to the middle position to contact and press the end edge of a wafer, the pressing member is liable to be damaged as it is rubbed by the outer periphery of the wafer, and its durability has been a problem. The pressing member (55) is constructed so that it is movable between a “pressing” position where it contacts and presses the end edge of the wafer (10) and a “retracted” position where it is spaced away from the end edge of the wafer (10) and so that when the pressing member (55) is moved from the “retracted” position to the “pressing” position, the direction of movement, (A), of the pressing member (55) at the instant of contact with the end edge of the wafer (10) is substantially perpendicular to the contour line of the portion of the wafer (10) to be contacted by the pressing member (55).