发明名称 |
Sterilization system with a plasma generator controlled by a digital signal processor |
摘要 |
A sterilization system applies power to a plasma within a chamber to remove gas or vapor species from an article. The sterilization system includes a power feedback control system for controlling the power applied to the plasma. The power feedback control system includes a current monitor adapted to produce a first signal indicative of a current applied to the plasma within the chamber. The power feedback control system further includes a voltage monitor adapted to produce a second signal indicative of a voltage applied to the plasma within the chamber. The power feedback control system further includes a power control module comprising a programmable digital signal processor. The digital signal processor is adapted to receive and process the first signal and the second signal by multiplying the current and the voltage and producing a third signal indicative of the product of the current and the voltage. The power feedback control system further includes a plasma generator coupled to the power control module and adapted to adjust, in response to the third signal, the power applied to the plasma within the chamber.
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申请公布号 |
US2003059340(A1) |
申请公布日期 |
2003.03.27 |
申请号 |
US20020266063 |
申请日期 |
2002.10.07 |
申请人 |
CHIEN JOHN;PLATT ROBERT C.;LEMUS ANTHONY |
发明人 |
CHIEN JOHN;PLATT ROBERT C.;LEMUS ANTHONY |
分类号 |
H05H1/00;A61L2/14;A61L2/18;A61L2/20;A61L2/24;H05H1/24;H05H1/46;(IPC1-7):A61L2/14 |
主分类号 |
H05H1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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